79852

Автор(ы): 

Автор(ов): 

5

Параметры публикации

Тип публикации: 

Статья в журнале/сборнике

Название: 

Scanning electron microscopy investigation of surface acoustic wave propagation in a 41◦ yx-cut of a LiNbO3 crystal/Si layered structure

Электронная публикация: 

Да

ISBN/ISSN: 

2073-4352

DOI: 

10.3390/cryst11091082

Наименование источника: 

  • Crystals

Обозначение и номер тома: 

V: 11 № 9

Город: 

  • Basel, Switzerland

Издательство: 

  • MDPI

Год издания: 

2021

Страницы: 

https://www.mdpi.com/2073-4352/11/9/1082
Аннотация
The propagation process of the surface acoustic waves (SAW) and the pseudo-surface acoustic waves (PSAW) in a bonded layered structure of a 41◦ YX-cut of a LiNbO3 crystal/Si(100) crystal was investigated. The scanning electron microscopy (SEM) method,in the low-energy secondary electrons registration mode, made it possible to visualize the SAW and PSAW in the LiNbO3/Si layered structure. The process of the SAW and PSAW propagation in a LiNbO3/Si layered structure and in a bulk 41◦ YX-cut of a LiNbO3 crystal were compared. It was demonstrated that the SAW velocities in the layered LiNbO3/Si structure exceed the typical SAW velocities for LiNbO3 and Si single crystals. In the layered structure, the SAW and PSAW velocities were 4062 m/s, 4731 m/s, and 5871 m/s. It was also demonstrated that the PSAW velocities are the same in the LiNbO3/Si layered structure and in the bulk 41◦ YX-cut of a LiNbO3 crystal.

Библиографическая ссылка: 

Рощупкин Д.В., Емелин Е.В., Плотицына О.А., Мололкин А.А., Тельминов О.А. Scanning electron microscopy investigation of surface acoustic wave propagation in a 41◦ yx-cut of a LiNbO3 crystal/Si layered structure // Crystals. 2021. V: 11 № 9. С. https://www.mdpi.com/2073-4352/11/9/1082.