Доклады |
1 | Лысенко И.А., Зыков Д.Д., Ишуткин С.В., Мещеряков Р.В. The use of tcad in technology simulation for increasing the efficiency of semiconductor manufacturing / AIP CONFERENCE PROCEEDINGS (Proceedings of the XIII International Conference of Students and Young Scientists" 2016). Томск: American Institute of Physics Inc., 2016. С. 060012. | 2016 |